8/23/2011	9:27:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/23/2011	9:27:04 AM	Recipe started at 9:27 AM
8/23/2011	9:27:04 AM	Helium valve closed
8/23/2011	9:27:04 AM	H2 valve closed
8/23/2011	9:27:04 AM	BCl3 valve closed
8/23/2011	9:27:04 AM	PH3 valve closed
8/23/2011	9:27:04 AM	SiCl4 pre valve closed
8/23/2011	9:27:04 AM	SiCl4 post valve closed
8/23/2011	9:27:04 AM	Main Vac valve closed
8/23/2011	9:27:04 AM	Bypass valve closed
8/23/2011	9:27:04 AM	Bubbler valve closed
8/23/2011	9:27:04 AM	Helium MFC set to  0.000000
8/23/2011	9:27:04 AM	H2 MFC set to  0.000000
8/23/2011	9:27:04 AM	BCl3 MFC set to  0.000000
8/23/2011	9:27:04 AM	PHl3 MFC set to  0.000000
8/23/2011	9:27:04 AM	SiCl4 MFC set to  0.000000
8/23/2011	9:27:04 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	9:27:04 AM	Tube furnace set to 0
8/23/2011	9:27:04 AM	Run finished at 9:27 AM
8/23/2011	9:27:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/23/2011	9:27:59 AM	Main Vac valve opened
8/23/2011	9:29:11 AM	Recipe started at 9:29 AM
8/23/2011	9:29:11 AM	Helium valve closed
8/23/2011	9:29:11 AM	H2 valve closed
8/23/2011	9:29:11 AM	BCl3 valve closed
8/23/2011	9:29:11 AM	PH3 valve closed
8/23/2011	9:29:11 AM	SiCl4 pre valve closed
8/23/2011	9:29:11 AM	SiCl4 post valve closed
8/23/2011	9:29:11 AM	Main Vac valve closed
8/23/2011	9:29:11 AM	Bypass valve closed
8/23/2011	9:29:11 AM	Bubbler valve closed
8/23/2011	9:29:11 AM	Helium MFC set to  0.000000
8/23/2011	9:29:11 AM	H2 MFC set to  0.000000
8/23/2011	9:29:11 AM	BCl3 MFC set to  0.000000
8/23/2011	9:29:11 AM	PHl3 MFC set to  0.000000
8/23/2011	9:29:11 AM	SiCl4 MFC set to  0.000000
8/23/2011	9:29:11 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	9:29:12 AM	Tube furnace set to 0
8/23/2011	9:29:15 AM	Helium valve closed
8/23/2011	9:29:15 AM	BCl3 valve closed
8/23/2011	9:29:15 AM	PH3 valve closed
8/23/2011	9:29:15 AM	SiCl4 pre valve closed
8/23/2011	9:29:15 AM	SiCl4 post valve closed
8/23/2011	9:29:15 AM	Main Vac valve closed
8/23/2011	9:29:15 AM	Bypass valve closed
8/23/2011	9:29:15 AM	Bubbler valve closed
8/23/2011	9:29:15 AM	H2 valve opened
8/23/2011	9:29:15 AM	Helium MFC set to  0.000000
8/23/2011	9:29:15 AM	H2 MFC set to  500.000000
8/23/2011	9:29:15 AM	BCl3 MFC set to  0.000000
8/23/2011	9:29:15 AM	PHl3 MFC set to  0.000000
8/23/2011	9:29:15 AM	SiCl4 MFC set to  0.000000
8/23/2011	9:29:15 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	9:29:15 AM	Tube furnace set to 0
8/23/2011	9:30:23 AM	Helium valve closed
8/23/2011	9:30:23 AM	BCl3 valve closed
8/23/2011	9:30:23 AM	PH3 valve closed
8/23/2011	9:30:23 AM	SiCl4 pre valve closed
8/23/2011	9:30:23 AM	SiCl4 post valve closed
8/23/2011	9:30:23 AM	Main Vac valve closed
8/23/2011	9:30:23 AM	Bypass valve closed
8/23/2011	9:30:23 AM	H2 valve opened
8/23/2011	9:30:23 AM	Bubbler valve opened
8/23/2011	9:30:23 AM	Helium MFC set to  0.000000
8/23/2011	9:30:23 AM	H2 MFC set to  500.000000
8/23/2011	9:30:23 AM	BCl3 MFC set to  0.000000
8/23/2011	9:30:23 AM	PHl3 MFC set to  0.000000
8/23/2011	9:30:23 AM	SiCl4 MFC set to  0.000000
8/23/2011	9:30:23 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	9:30:23 AM	Tube furnace set to 0
8/23/2011	9:30:24 AM	Helium valve closed
8/23/2011	9:30:24 AM	BCl3 valve closed
8/23/2011	9:30:24 AM	PH3 valve closed
8/23/2011	9:30:24 AM	SiCl4 pre valve closed
8/23/2011	9:30:24 AM	SiCl4 post valve closed
8/23/2011	9:30:24 AM	Main Vac valve closed
8/23/2011	9:30:24 AM	Bypass valve closed
8/23/2011	9:30:24 AM	H2 valve opened
8/23/2011	9:30:24 AM	Bubbler valve opened
8/23/2011	9:30:24 AM	Helium MFC set to  0.000000
8/23/2011	9:30:24 AM	H2 MFC set to  500.000000
8/23/2011	9:30:24 AM	BCl3 MFC set to  0.000000
8/23/2011	9:30:24 AM	PHl3 MFC set to  0.000000
8/23/2011	9:30:24 AM	SiCl4 MFC set to  0.000000
8/23/2011	9:30:24 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	9:30:24 AM	Tube furnace set to 1000
8/23/2011	9:50:24 AM	Helium valve closed
8/23/2011	9:50:24 AM	PH3 valve closed
8/23/2011	9:50:24 AM	Main Vac valve closed
8/23/2011	9:50:24 AM	Bypass valve closed
8/23/2011	9:50:24 AM	H2 valve opened
8/23/2011	9:50:24 AM	BCl3 valve opened
8/23/2011	9:50:24 AM	SiCl4 pre valve opened
8/23/2011	9:50:24 AM	SiCl4 post valve opened
8/23/2011	9:50:24 AM	Bubbler valve opened
8/23/2011	9:50:24 AM	Helium MFC set to  0.000000
8/23/2011	9:50:24 AM	H2 MFC set to  500.000000
8/23/2011	9:50:24 AM	BCl3 MFC set to  2.500000
8/23/2011	9:50:24 AM	PHl3 MFC set to  0.000000
8/23/2011	9:50:24 AM	SiCl4 MFC set to  50.000000
8/23/2011	9:50:24 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	9:50:24 AM	Tube furnace set to 1000
8/23/2011	9:55:24 AM	Helium valve closed
8/23/2011	9:55:24 AM	BCl3 valve closed
8/23/2011	9:55:24 AM	PH3 valve closed
8/23/2011	9:55:24 AM	SiCl4 pre valve closed
8/23/2011	9:55:24 AM	SiCl4 post valve closed
8/23/2011	9:55:24 AM	Main Vac valve closed
8/23/2011	9:55:24 AM	Bypass valve closed
8/23/2011	9:55:24 AM	H2 valve opened
8/23/2011	9:55:24 AM	Bubbler valve opened
8/23/2011	9:55:24 AM	Helium MFC set to  0.000000
8/23/2011	9:55:24 AM	H2 MFC set to  500.000000
8/23/2011	9:55:24 AM	BCl3 MFC set to  0.000000
8/23/2011	9:55:24 AM	PHl3 MFC set to  0.000000
8/23/2011	9:55:24 AM	SiCl4 MFC set to  0.000000
8/23/2011	9:55:24 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	9:55:24 AM	Tube furnace set to 750
8/23/2011	10:00:24 AM	H2 valve closed
8/23/2011	10:00:24 AM	BCl3 valve closed
8/23/2011	10:00:24 AM	PH3 valve closed
8/23/2011	10:00:24 AM	SiCl4 pre valve closed
8/23/2011	10:00:24 AM	SiCl4 post valve closed
8/23/2011	10:00:24 AM	Main Vac valve closed
8/23/2011	10:00:24 AM	Bypass valve closed
8/23/2011	10:00:24 AM	Helium valve opened
8/23/2011	10:00:24 AM	Bubbler valve opened
8/23/2011	10:00:24 AM	Helium MFC set to  500.000000
8/23/2011	10:00:24 AM	H2 MFC set to  0.000000
8/23/2011	10:00:24 AM	BCl3 MFC set to  0.000000
8/23/2011	10:00:24 AM	PHl3 MFC set to  0.000000
8/23/2011	10:00:24 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:00:24 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:00:24 AM	Tube furnace set to 0
8/23/2011	10:33:44 AM	Helium valve closed
8/23/2011	10:33:44 AM	H2 valve closed
8/23/2011	10:33:44 AM	BCl3 valve closed
8/23/2011	10:33:44 AM	PH3 valve closed
8/23/2011	10:33:44 AM	SiCl4 pre valve closed
8/23/2011	10:33:44 AM	SiCl4 post valve closed
8/23/2011	10:33:44 AM	Main Vac valve closed
8/23/2011	10:33:44 AM	Bypass valve closed
8/23/2011	10:33:44 AM	Bubbler valve closed
8/23/2011	10:33:44 AM	Helium MFC set to  0.000000
8/23/2011	10:33:44 AM	H2 MFC set to  0.000000
8/23/2011	10:33:44 AM	BCl3 MFC set to  0.000000
8/23/2011	10:33:44 AM	PHl3 MFC set to  0.000000
8/23/2011	10:33:44 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:33:44 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:33:45 AM	Tube furnace set to 0
8/23/2011	10:33:46 AM	Run finished at 10:33 AM
8/23/2011	10:45:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/23/2011	10:45:35 AM	Recipe started at 10:45 AM
8/23/2011	10:45:35 AM	Helium valve closed
8/23/2011	10:45:35 AM	H2 valve closed
8/23/2011	10:45:35 AM	BCl3 valve closed
8/23/2011	10:45:35 AM	PH3 valve closed
8/23/2011	10:45:35 AM	SiCl4 pre valve closed
8/23/2011	10:45:35 AM	SiCl4 post valve closed
8/23/2011	10:45:35 AM	Main Vac valve closed
8/23/2011	10:45:35 AM	Bubbler valve closed
8/23/2011	10:45:35 AM	Bypass valve opened
8/23/2011	10:45:35 AM	Helium MFC set to  0.000000
8/23/2011	10:45:35 AM	H2 MFC set to  0.000000
8/23/2011	10:45:35 AM	BCl3 MFC set to  0.000000
8/23/2011	10:45:35 AM	PHl3 MFC set to  0.000000
8/23/2011	10:45:35 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:45:35 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:45:35 AM	Tube furnace set to 0
8/23/2011	10:46:43 AM	Helium valve closed
8/23/2011	10:46:43 AM	H2 valve closed
8/23/2011	10:46:43 AM	BCl3 valve closed
8/23/2011	10:46:43 AM	PH3 valve closed
8/23/2011	10:46:43 AM	SiCl4 pre valve closed
8/23/2011	10:46:43 AM	SiCl4 post valve closed
8/23/2011	10:46:43 AM	Main Vac valve closed
8/23/2011	10:46:43 AM	Bubbler valve closed
8/23/2011	10:46:43 AM	Bypass valve opened
8/23/2011	10:46:43 AM	Helium MFC set to  0.000000
8/23/2011	10:46:43 AM	H2 MFC set to  0.000000
8/23/2011	10:46:43 AM	BCl3 MFC set to  0.000000
8/23/2011	10:46:43 AM	PHl3 MFC set to  0.000000
8/23/2011	10:46:43 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:46:43 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:46:43 AM	Tube furnace set to 0
8/23/2011	10:47:43 AM	Helium valve closed
8/23/2011	10:47:43 AM	H2 valve closed
8/23/2011	10:47:43 AM	BCl3 valve closed
8/23/2011	10:47:43 AM	PH3 valve closed
8/23/2011	10:47:43 AM	SiCl4 pre valve closed
8/23/2011	10:47:43 AM	SiCl4 post valve closed
8/23/2011	10:47:43 AM	Bypass valve closed
8/23/2011	10:47:43 AM	Bubbler valve closed
8/23/2011	10:47:43 AM	Main Vac valve opened
8/23/2011	10:47:43 AM	Helium MFC set to  0.000000
8/23/2011	10:47:43 AM	H2 MFC set to  0.000000
8/23/2011	10:47:43 AM	BCl3 MFC set to  0.000000
8/23/2011	10:47:43 AM	PHl3 MFC set to  0.000000
8/23/2011	10:47:43 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:47:43 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:47:43 AM	Tube furnace set to 0
8/23/2011	10:47:44 AM	Run finished at 10:47 AM
8/23/2011	10:47:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/23/2011	10:48:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/23/2011	10:48:37 AM	Recipe started at 10:48 AM
8/23/2011	10:48:37 AM	Helium valve closed
8/23/2011	10:48:37 AM	H2 valve closed
8/23/2011	10:48:37 AM	BCl3 valve closed
8/23/2011	10:48:37 AM	PH3 valve closed
8/23/2011	10:48:37 AM	SiCl4 pre valve closed
8/23/2011	10:48:37 AM	SiCl4 post valve closed
8/23/2011	10:48:37 AM	Main Vac valve closed
8/23/2011	10:48:37 AM	Bubbler valve closed
8/23/2011	10:48:37 AM	Bypass valve opened
8/23/2011	10:48:37 AM	Helium MFC set to  0.000000
8/23/2011	10:48:37 AM	H2 MFC set to  0.000000
8/23/2011	10:48:37 AM	BCl3 MFC set to  0.000000
8/23/2011	10:48:37 AM	PHl3 MFC set to  0.000000
8/23/2011	10:48:37 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:48:37 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:48:37 AM	Tube furnace set to 0
8/23/2011	10:48:37 AM	Helium valve closed
8/23/2011	10:48:37 AM	H2 valve closed
8/23/2011	10:48:37 AM	BCl3 valve closed
8/23/2011	10:48:37 AM	PH3 valve closed
8/23/2011	10:48:37 AM	SiCl4 pre valve closed
8/23/2011	10:48:37 AM	SiCl4 post valve closed
8/23/2011	10:48:37 AM	Main Vac valve closed
8/23/2011	10:48:37 AM	Bubbler valve closed
8/23/2011	10:48:37 AM	Bypass valve opened
8/23/2011	10:48:37 AM	Helium MFC set to  0.000000
8/23/2011	10:48:37 AM	H2 MFC set to  0.000000
8/23/2011	10:48:37 AM	BCl3 MFC set to  0.000000
8/23/2011	10:48:37 AM	PHl3 MFC set to  0.000000
8/23/2011	10:48:37 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:48:37 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:48:38 AM	Tube furnace set to 0
8/23/2011	10:49:08 AM	Helium valve closed
8/23/2011	10:49:08 AM	H2 valve closed
8/23/2011	10:49:08 AM	BCl3 valve closed
8/23/2011	10:49:08 AM	PH3 valve closed
8/23/2011	10:49:08 AM	SiCl4 pre valve closed
8/23/2011	10:49:08 AM	SiCl4 post valve closed
8/23/2011	10:49:08 AM	Bypass valve closed
8/23/2011	10:49:08 AM	Bubbler valve closed
8/23/2011	10:49:08 AM	Main Vac valve opened
8/23/2011	10:49:08 AM	Helium MFC set to  0.000000
8/23/2011	10:49:08 AM	H2 MFC set to  0.000000
8/23/2011	10:49:08 AM	BCl3 MFC set to  0.000000
8/23/2011	10:49:08 AM	PHl3 MFC set to  0.000000
8/23/2011	10:49:08 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:49:08 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:49:08 AM	Tube furnace set to 0
8/23/2011	10:49:38 AM	H2 valve closed
8/23/2011	10:49:38 AM	BCl3 valve closed
8/23/2011	10:49:38 AM	PH3 valve closed
8/23/2011	10:49:38 AM	SiCl4 pre valve closed
8/23/2011	10:49:38 AM	SiCl4 post valve closed
8/23/2011	10:49:38 AM	Bypass valve closed
8/23/2011	10:49:38 AM	Bubbler valve closed
8/23/2011	10:49:38 AM	Helium valve opened
8/23/2011	10:49:38 AM	Main Vac valve opened
8/23/2011	10:49:38 AM	Helium MFC set to  20.000000
8/23/2011	10:49:38 AM	H2 MFC set to  0.000000
8/23/2011	10:49:38 AM	BCl3 MFC set to  0.000000
8/23/2011	10:49:38 AM	PHl3 MFC set to  0.000000
8/23/2011	10:49:38 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:49:38 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:49:38 AM	Tube furnace set to 0
8/23/2011	10:50:08 AM	Helium valve closed
8/23/2011	10:50:08 AM	H2 valve closed
8/23/2011	10:50:08 AM	BCl3 valve closed
8/23/2011	10:50:08 AM	PH3 valve closed
8/23/2011	10:50:08 AM	SiCl4 pre valve closed
8/23/2011	10:50:08 AM	SiCl4 post valve closed
8/23/2011	10:50:08 AM	Bypass valve closed
8/23/2011	10:50:08 AM	Bubbler valve closed
8/23/2011	10:50:08 AM	Main Vac valve opened
8/23/2011	10:50:08 AM	Helium MFC set to  0.000000
8/23/2011	10:50:08 AM	H2 MFC set to  0.000000
8/23/2011	10:50:08 AM	BCl3 MFC set to  0.000000
8/23/2011	10:50:08 AM	PHl3 MFC set to  0.000000
8/23/2011	10:50:08 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:50:08 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:50:08 AM	Tube furnace set to 0
8/23/2011	10:50:38 AM	H2 valve closed
8/23/2011	10:50:38 AM	BCl3 valve closed
8/23/2011	10:50:38 AM	PH3 valve closed
8/23/2011	10:50:38 AM	SiCl4 pre valve closed
8/23/2011	10:50:38 AM	SiCl4 post valve closed
8/23/2011	10:50:38 AM	Bypass valve closed
8/23/2011	10:50:38 AM	Bubbler valve closed
8/23/2011	10:50:38 AM	Helium valve opened
8/23/2011	10:50:38 AM	Main Vac valve opened
8/23/2011	10:50:38 AM	Helium MFC set to  20.000000
8/23/2011	10:50:38 AM	H2 MFC set to  0.000000
8/23/2011	10:50:38 AM	BCl3 MFC set to  0.000000
8/23/2011	10:50:38 AM	PHl3 MFC set to  0.000000
8/23/2011	10:50:38 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:50:38 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:50:38 AM	Tube furnace set to 0
8/23/2011	10:51:08 AM	Helium valve closed
8/23/2011	10:51:08 AM	H2 valve closed
8/23/2011	10:51:08 AM	BCl3 valve closed
8/23/2011	10:51:08 AM	PH3 valve closed
8/23/2011	10:51:08 AM	SiCl4 pre valve closed
8/23/2011	10:51:08 AM	SiCl4 post valve closed
8/23/2011	10:51:08 AM	Bypass valve closed
8/23/2011	10:51:08 AM	Bubbler valve closed
8/23/2011	10:51:08 AM	Main Vac valve opened
8/23/2011	10:51:08 AM	Helium MFC set to  0.000000
8/23/2011	10:51:08 AM	H2 MFC set to  0.000000
8/23/2011	10:51:08 AM	BCl3 MFC set to  0.000000
8/23/2011	10:51:08 AM	PHl3 MFC set to  0.000000
8/23/2011	10:51:08 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:51:08 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:51:09 AM	Tube furnace set to 0
8/23/2011	10:51:39 AM	H2 valve closed
8/23/2011	10:51:39 AM	BCl3 valve closed
8/23/2011	10:51:39 AM	PH3 valve closed
8/23/2011	10:51:39 AM	SiCl4 pre valve closed
8/23/2011	10:51:39 AM	SiCl4 post valve closed
8/23/2011	10:51:39 AM	Bypass valve closed
8/23/2011	10:51:39 AM	Bubbler valve closed
8/23/2011	10:51:39 AM	Helium valve opened
8/23/2011	10:51:39 AM	Main Vac valve opened
8/23/2011	10:51:39 AM	Helium MFC set to  20.000000
8/23/2011	10:51:39 AM	H2 MFC set to  0.000000
8/23/2011	10:51:39 AM	BCl3 MFC set to  0.000000
8/23/2011	10:51:39 AM	PHl3 MFC set to  0.000000
8/23/2011	10:51:39 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:51:39 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:51:39 AM	Tube furnace set to 0
8/23/2011	10:52:09 AM	Helium valve closed
8/23/2011	10:52:09 AM	H2 valve closed
8/23/2011	10:52:09 AM	BCl3 valve closed
8/23/2011	10:52:09 AM	PH3 valve closed
8/23/2011	10:52:09 AM	SiCl4 pre valve closed
8/23/2011	10:52:09 AM	SiCl4 post valve closed
8/23/2011	10:52:09 AM	Bypass valve closed
8/23/2011	10:52:09 AM	Bubbler valve closed
8/23/2011	10:52:09 AM	Main Vac valve opened
8/23/2011	10:52:09 AM	Helium MFC set to  0.000000
8/23/2011	10:52:09 AM	H2 MFC set to  0.000000
8/23/2011	10:52:09 AM	BCl3 MFC set to  0.000000
8/23/2011	10:52:09 AM	PHl3 MFC set to  0.000000
8/23/2011	10:52:09 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:52:09 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:52:09 AM	Tube furnace set to 0
8/23/2011	10:52:39 AM	H2 valve closed
8/23/2011	10:52:39 AM	BCl3 valve closed
8/23/2011	10:52:39 AM	PH3 valve closed
8/23/2011	10:52:39 AM	SiCl4 pre valve closed
8/23/2011	10:52:39 AM	SiCl4 post valve closed
8/23/2011	10:52:39 AM	Bypass valve closed
8/23/2011	10:52:39 AM	Bubbler valve closed
8/23/2011	10:52:39 AM	Helium valve opened
8/23/2011	10:52:39 AM	Main Vac valve opened
8/23/2011	10:52:39 AM	Helium MFC set to  20.000000
8/23/2011	10:52:39 AM	H2 MFC set to  0.000000
8/23/2011	10:52:39 AM	BCl3 MFC set to  0.000000
8/23/2011	10:52:39 AM	PHl3 MFC set to  0.000000
8/23/2011	10:52:39 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:52:39 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:52:39 AM	Tube furnace set to 0
8/23/2011	10:53:09 AM	Helium valve closed
8/23/2011	10:53:09 AM	H2 valve closed
8/23/2011	10:53:09 AM	BCl3 valve closed
8/23/2011	10:53:09 AM	PH3 valve closed
8/23/2011	10:53:09 AM	SiCl4 pre valve closed
8/23/2011	10:53:09 AM	SiCl4 post valve closed
8/23/2011	10:53:09 AM	Bypass valve closed
8/23/2011	10:53:09 AM	Bubbler valve closed
8/23/2011	10:53:09 AM	Main Vac valve opened
8/23/2011	10:53:09 AM	Helium MFC set to  0.000000
8/23/2011	10:53:09 AM	H2 MFC set to  0.000000
8/23/2011	10:53:09 AM	BCl3 MFC set to  0.000000
8/23/2011	10:53:09 AM	PHl3 MFC set to  0.000000
8/23/2011	10:53:09 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:53:09 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:53:09 AM	Tube furnace set to 0
8/23/2011	10:53:39 AM	H2 valve closed
8/23/2011	10:53:39 AM	BCl3 valve closed
8/23/2011	10:53:39 AM	PH3 valve closed
8/23/2011	10:53:39 AM	SiCl4 pre valve closed
8/23/2011	10:53:39 AM	SiCl4 post valve closed
8/23/2011	10:53:39 AM	Bypass valve closed
8/23/2011	10:53:39 AM	Bubbler valve closed
8/23/2011	10:53:39 AM	Helium valve opened
8/23/2011	10:53:39 AM	Main Vac valve opened
8/23/2011	10:53:39 AM	Helium MFC set to  20.000000
8/23/2011	10:53:39 AM	H2 MFC set to  0.000000
8/23/2011	10:53:39 AM	BCl3 MFC set to  0.000000
8/23/2011	10:53:39 AM	PHl3 MFC set to  0.000000
8/23/2011	10:53:39 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:53:39 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:53:40 AM	Tube furnace set to 0
8/23/2011	10:54:10 AM	Helium valve closed
8/23/2011	10:54:10 AM	H2 valve closed
8/23/2011	10:54:10 AM	BCl3 valve closed
8/23/2011	10:54:10 AM	PH3 valve closed
8/23/2011	10:54:10 AM	SiCl4 pre valve closed
8/23/2011	10:54:10 AM	SiCl4 post valve closed
8/23/2011	10:54:10 AM	Bypass valve closed
8/23/2011	10:54:10 AM	Bubbler valve closed
8/23/2011	10:54:10 AM	Main Vac valve opened
8/23/2011	10:54:10 AM	Helium MFC set to  0.000000
8/23/2011	10:54:10 AM	H2 MFC set to  0.000000
8/23/2011	10:54:10 AM	BCl3 MFC set to  0.000000
8/23/2011	10:54:10 AM	PHl3 MFC set to  0.000000
8/23/2011	10:54:10 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:54:10 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:54:10 AM	Tube furnace set to 0
8/23/2011	10:54:40 AM	H2 valve closed
8/23/2011	10:54:40 AM	BCl3 valve closed
8/23/2011	10:54:40 AM	PH3 valve closed
8/23/2011	10:54:40 AM	SiCl4 pre valve closed
8/23/2011	10:54:40 AM	SiCl4 post valve closed
8/23/2011	10:54:40 AM	Bypass valve closed
8/23/2011	10:54:40 AM	Bubbler valve closed
8/23/2011	10:54:40 AM	Helium valve opened
8/23/2011	10:54:40 AM	Main Vac valve opened
8/23/2011	10:54:40 AM	Helium MFC set to  20.000000
8/23/2011	10:54:40 AM	H2 MFC set to  0.000000
8/23/2011	10:54:40 AM	BCl3 MFC set to  0.000000
8/23/2011	10:54:40 AM	PHl3 MFC set to  0.000000
8/23/2011	10:54:40 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:54:40 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:54:40 AM	Tube furnace set to 0
8/23/2011	10:55:10 AM	Helium valve closed
8/23/2011	10:55:10 AM	H2 valve closed
8/23/2011	10:55:10 AM	BCl3 valve closed
8/23/2011	10:55:10 AM	PH3 valve closed
8/23/2011	10:55:10 AM	SiCl4 pre valve closed
8/23/2011	10:55:10 AM	SiCl4 post valve closed
8/23/2011	10:55:10 AM	Bypass valve closed
8/23/2011	10:55:10 AM	Bubbler valve closed
8/23/2011	10:55:10 AM	Main Vac valve opened
8/23/2011	10:55:10 AM	Helium MFC set to  0.000000
8/23/2011	10:55:10 AM	H2 MFC set to  0.000000
8/23/2011	10:55:10 AM	BCl3 MFC set to  0.000000
8/23/2011	10:55:10 AM	PHl3 MFC set to  0.000000
8/23/2011	10:55:10 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:55:10 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:55:10 AM	Tube furnace set to 0
8/23/2011	10:55:40 AM	H2 valve closed
8/23/2011	10:55:40 AM	BCl3 valve closed
8/23/2011	10:55:40 AM	PH3 valve closed
8/23/2011	10:55:40 AM	SiCl4 pre valve closed
8/23/2011	10:55:40 AM	SiCl4 post valve closed
8/23/2011	10:55:40 AM	Bypass valve closed
8/23/2011	10:55:40 AM	Bubbler valve closed
8/23/2011	10:55:40 AM	Helium valve opened
8/23/2011	10:55:40 AM	Main Vac valve opened
8/23/2011	10:55:40 AM	Helium MFC set to  20.000000
8/23/2011	10:55:40 AM	H2 MFC set to  0.000000
8/23/2011	10:55:40 AM	BCl3 MFC set to  0.000000
8/23/2011	10:55:40 AM	PHl3 MFC set to  0.000000
8/23/2011	10:55:40 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:55:40 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:55:40 AM	Tube furnace set to 0
8/23/2011	10:56:10 AM	Helium valve closed
8/23/2011	10:56:10 AM	H2 valve closed
8/23/2011	10:56:10 AM	BCl3 valve closed
8/23/2011	10:56:10 AM	PH3 valve closed
8/23/2011	10:56:10 AM	SiCl4 pre valve closed
8/23/2011	10:56:10 AM	SiCl4 post valve closed
8/23/2011	10:56:10 AM	Bypass valve closed
8/23/2011	10:56:10 AM	Bubbler valve closed
8/23/2011	10:56:10 AM	Main Vac valve opened
8/23/2011	10:56:10 AM	Helium MFC set to  0.000000
8/23/2011	10:56:10 AM	H2 MFC set to  0.000000
8/23/2011	10:56:10 AM	BCl3 MFC set to  0.000000
8/23/2011	10:56:10 AM	PHl3 MFC set to  0.000000
8/23/2011	10:56:10 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:56:10 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:56:11 AM	Tube furnace set to 0
8/23/2011	10:56:41 AM	H2 valve closed
8/23/2011	10:56:41 AM	BCl3 valve closed
8/23/2011	10:56:41 AM	PH3 valve closed
8/23/2011	10:56:41 AM	SiCl4 pre valve closed
8/23/2011	10:56:41 AM	SiCl4 post valve closed
8/23/2011	10:56:41 AM	Bypass valve closed
8/23/2011	10:56:41 AM	Bubbler valve closed
8/23/2011	10:56:41 AM	Helium valve opened
8/23/2011	10:56:41 AM	Main Vac valve opened
8/23/2011	10:56:41 AM	Helium MFC set to  20.000000
8/23/2011	10:56:41 AM	H2 MFC set to  0.000000
8/23/2011	10:56:41 AM	BCl3 MFC set to  0.000000
8/23/2011	10:56:41 AM	PHl3 MFC set to  0.000000
8/23/2011	10:56:41 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:56:41 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:56:41 AM	Tube furnace set to 0
8/23/2011	10:57:11 AM	Helium valve closed
8/23/2011	10:57:11 AM	H2 valve closed
8/23/2011	10:57:11 AM	BCl3 valve closed
8/23/2011	10:57:11 AM	PH3 valve closed
8/23/2011	10:57:11 AM	SiCl4 pre valve closed
8/23/2011	10:57:11 AM	SiCl4 post valve closed
8/23/2011	10:57:11 AM	Bypass valve closed
8/23/2011	10:57:11 AM	Bubbler valve closed
8/23/2011	10:57:11 AM	Main Vac valve opened
8/23/2011	10:57:11 AM	Helium MFC set to  0.000000
8/23/2011	10:57:11 AM	H2 MFC set to  0.000000
8/23/2011	10:57:11 AM	BCl3 MFC set to  0.000000
8/23/2011	10:57:11 AM	PHl3 MFC set to  0.000000
8/23/2011	10:57:11 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:57:11 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:57:11 AM	Tube furnace set to 0
8/23/2011	10:57:41 AM	H2 valve closed
8/23/2011	10:57:41 AM	BCl3 valve closed
8/23/2011	10:57:41 AM	PH3 valve closed
8/23/2011	10:57:41 AM	SiCl4 pre valve closed
8/23/2011	10:57:41 AM	SiCl4 post valve closed
8/23/2011	10:57:41 AM	Bypass valve closed
8/23/2011	10:57:41 AM	Bubbler valve closed
8/23/2011	10:57:41 AM	Helium valve opened
8/23/2011	10:57:41 AM	Main Vac valve opened
8/23/2011	10:57:41 AM	Helium MFC set to  20.000000
8/23/2011	10:57:41 AM	H2 MFC set to  0.000000
8/23/2011	10:57:41 AM	BCl3 MFC set to  0.000000
8/23/2011	10:57:41 AM	PHl3 MFC set to  0.000000
8/23/2011	10:57:41 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:57:41 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:57:41 AM	Tube furnace set to 0
8/23/2011	10:58:11 AM	Helium valve closed
8/23/2011	10:58:11 AM	H2 valve closed
8/23/2011	10:58:11 AM	BCl3 valve closed
8/23/2011	10:58:11 AM	PH3 valve closed
8/23/2011	10:58:11 AM	SiCl4 pre valve closed
8/23/2011	10:58:11 AM	SiCl4 post valve closed
8/23/2011	10:58:11 AM	Bypass valve closed
8/23/2011	10:58:11 AM	Bubbler valve closed
8/23/2011	10:58:11 AM	Main Vac valve opened
8/23/2011	10:58:11 AM	Helium MFC set to  0.000000
8/23/2011	10:58:11 AM	H2 MFC set to  0.000000
8/23/2011	10:58:11 AM	BCl3 MFC set to  0.000000
8/23/2011	10:58:11 AM	PHl3 MFC set to  0.000000
8/23/2011	10:58:11 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:58:11 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:58:11 AM	Tube furnace set to 0
8/23/2011	10:58:41 AM	H2 valve closed
8/23/2011	10:58:41 AM	BCl3 valve closed
8/23/2011	10:58:41 AM	PH3 valve closed
8/23/2011	10:58:41 AM	SiCl4 pre valve closed
8/23/2011	10:58:41 AM	SiCl4 post valve closed
8/23/2011	10:58:41 AM	Bypass valve closed
8/23/2011	10:58:41 AM	Bubbler valve closed
8/23/2011	10:58:41 AM	Helium valve opened
8/23/2011	10:58:41 AM	Main Vac valve opened
8/23/2011	10:58:41 AM	Helium MFC set to  20.000000
8/23/2011	10:58:41 AM	H2 MFC set to  0.000000
8/23/2011	10:58:41 AM	BCl3 MFC set to  0.000000
8/23/2011	10:58:41 AM	PHl3 MFC set to  0.000000
8/23/2011	10:58:41 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:58:41 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:58:42 AM	Tube furnace set to 0
8/23/2011	10:59:12 AM	Helium valve closed
8/23/2011	10:59:12 AM	H2 valve closed
8/23/2011	10:59:12 AM	BCl3 valve closed
8/23/2011	10:59:12 AM	PH3 valve closed
8/23/2011	10:59:12 AM	SiCl4 pre valve closed
8/23/2011	10:59:12 AM	SiCl4 post valve closed
8/23/2011	10:59:12 AM	Bypass valve closed
8/23/2011	10:59:12 AM	Bubbler valve closed
8/23/2011	10:59:12 AM	Main Vac valve opened
8/23/2011	10:59:12 AM	Helium MFC set to  0.000000
8/23/2011	10:59:12 AM	H2 MFC set to  0.000000
8/23/2011	10:59:12 AM	BCl3 MFC set to  0.000000
8/23/2011	10:59:12 AM	PHl3 MFC set to  0.000000
8/23/2011	10:59:12 AM	SiCl4 MFC set to  0.000000
8/23/2011	10:59:12 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	10:59:12 AM	Tube furnace set to 0
8/23/2011	10:59:13 AM	Run finished at 10:59 AM
8/23/2011	10:59:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/23/2011	11:23:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/23/2011	11:23:05 AM	Recipe started at 11:23 AM
8/23/2011	11:23:05 AM	Helium valve closed
8/23/2011	11:23:05 AM	H2 valve closed
8/23/2011	11:23:05 AM	BCl3 valve closed
8/23/2011	11:23:05 AM	PH3 valve closed
8/23/2011	11:23:05 AM	SiCl4 pre valve closed
8/23/2011	11:23:05 AM	SiCl4 post valve closed
8/23/2011	11:23:05 AM	Main Vac valve closed
8/23/2011	11:23:05 AM	Bypass valve closed
8/23/2011	11:23:05 AM	Bubbler valve closed
8/23/2011	11:23:05 AM	Helium MFC set to  0.000000
8/23/2011	11:23:05 AM	H2 MFC set to  0.000000
8/23/2011	11:23:05 AM	BCl3 MFC set to  0.000000
8/23/2011	11:23:05 AM	PHl3 MFC set to  0.000000
8/23/2011	11:23:05 AM	SiCl4 MFC set to  0.000000
8/23/2011	11:23:05 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	11:23:05 AM	Tube furnace set to 0
8/23/2011	11:23:06 AM	Run finished at 11:23 AM
8/23/2011	11:23:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/23/2011	11:23:51 AM	Main Vac valve opened
8/23/2011	11:25:13 AM	Recipe started at 11:25 AM
8/23/2011	11:25:13 AM	Helium valve closed
8/23/2011	11:25:13 AM	H2 valve closed
8/23/2011	11:25:13 AM	BCl3 valve closed
8/23/2011	11:25:13 AM	PH3 valve closed
8/23/2011	11:25:13 AM	SiCl4 pre valve closed
8/23/2011	11:25:13 AM	SiCl4 post valve closed
8/23/2011	11:25:13 AM	Main Vac valve closed
8/23/2011	11:25:13 AM	Bypass valve closed
8/23/2011	11:25:13 AM	Bubbler valve closed
8/23/2011	11:25:13 AM	Helium MFC set to  0.000000
8/23/2011	11:25:13 AM	H2 MFC set to  0.000000
8/23/2011	11:25:13 AM	BCl3 MFC set to  0.000000
8/23/2011	11:25:13 AM	PHl3 MFC set to  0.000000
8/23/2011	11:25:13 AM	SiCl4 MFC set to  0.000000
8/23/2011	11:25:13 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	11:25:13 AM	Tube furnace set to 0
8/23/2011	11:25:16 AM	Helium valve closed
8/23/2011	11:25:16 AM	BCl3 valve closed
8/23/2011	11:25:16 AM	PH3 valve closed
8/23/2011	11:25:16 AM	SiCl4 pre valve closed
8/23/2011	11:25:16 AM	SiCl4 post valve closed
8/23/2011	11:25:16 AM	Main Vac valve closed
8/23/2011	11:25:16 AM	Bypass valve closed
8/23/2011	11:25:16 AM	Bubbler valve closed
8/23/2011	11:25:16 AM	H2 valve opened
8/23/2011	11:25:16 AM	Helium MFC set to  0.000000
8/23/2011	11:25:16 AM	H2 MFC set to  500.000000
8/23/2011	11:25:16 AM	BCl3 MFC set to  0.000000
8/23/2011	11:25:16 AM	PHl3 MFC set to  0.000000
8/23/2011	11:25:16 AM	SiCl4 MFC set to  0.000000
8/23/2011	11:25:16 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	11:25:16 AM	Tube furnace set to 0
8/23/2011	11:26:21 AM	Helium valve closed
8/23/2011	11:26:21 AM	BCl3 valve closed
8/23/2011	11:26:21 AM	PH3 valve closed
8/23/2011	11:26:21 AM	SiCl4 pre valve closed
8/23/2011	11:26:21 AM	SiCl4 post valve closed
8/23/2011	11:26:21 AM	Main Vac valve closed
8/23/2011	11:26:21 AM	Bypass valve closed
8/23/2011	11:26:21 AM	H2 valve opened
8/23/2011	11:26:21 AM	Bubbler valve opened
8/23/2011	11:26:21 AM	Helium MFC set to  0.000000
8/23/2011	11:26:21 AM	H2 MFC set to  500.000000
8/23/2011	11:26:21 AM	BCl3 MFC set to  0.000000
8/23/2011	11:26:21 AM	PHl3 MFC set to  0.000000
8/23/2011	11:26:21 AM	SiCl4 MFC set to  0.000000
8/23/2011	11:26:21 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	11:26:21 AM	Tube furnace set to 0
8/23/2011	11:26:22 AM	Helium valve closed
8/23/2011	11:26:22 AM	BCl3 valve closed
8/23/2011	11:26:22 AM	PH3 valve closed
8/23/2011	11:26:22 AM	SiCl4 pre valve closed
8/23/2011	11:26:22 AM	SiCl4 post valve closed
8/23/2011	11:26:22 AM	Main Vac valve closed
8/23/2011	11:26:22 AM	Bypass valve closed
8/23/2011	11:26:22 AM	H2 valve opened
8/23/2011	11:26:22 AM	Bubbler valve opened
8/23/2011	11:26:22 AM	Helium MFC set to  0.000000
8/23/2011	11:26:22 AM	H2 MFC set to  500.000000
8/23/2011	11:26:22 AM	BCl3 MFC set to  0.000000
8/23/2011	11:26:22 AM	PHl3 MFC set to  0.000000
8/23/2011	11:26:22 AM	SiCl4 MFC set to  0.000000
8/23/2011	11:26:22 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	11:26:23 AM	Tube furnace set to 1000
8/23/2011	11:46:23 AM	Helium valve closed
8/23/2011	11:46:23 AM	PH3 valve closed
8/23/2011	11:46:23 AM	Main Vac valve closed
8/23/2011	11:46:23 AM	Bypass valve closed
8/23/2011	11:46:23 AM	H2 valve opened
8/23/2011	11:46:23 AM	BCl3 valve opened
8/23/2011	11:46:23 AM	SiCl4 pre valve opened
8/23/2011	11:46:23 AM	SiCl4 post valve opened
8/23/2011	11:46:23 AM	Bubbler valve opened
8/23/2011	11:46:23 AM	Helium MFC set to  0.000000
8/23/2011	11:46:23 AM	H2 MFC set to  500.000000
8/23/2011	11:46:23 AM	BCl3 MFC set to  2.500000
8/23/2011	11:46:23 AM	PHl3 MFC set to  0.000000
8/23/2011	11:46:23 AM	SiCl4 MFC set to  50.000000
8/23/2011	11:46:23 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	11:46:23 AM	Tube furnace set to 1000
8/23/2011	11:51:23 AM	Helium valve closed
8/23/2011	11:51:23 AM	BCl3 valve closed
8/23/2011	11:51:23 AM	PH3 valve closed
8/23/2011	11:51:23 AM	SiCl4 pre valve closed
8/23/2011	11:51:23 AM	SiCl4 post valve closed
8/23/2011	11:51:23 AM	Main Vac valve closed
8/23/2011	11:51:23 AM	Bypass valve closed
8/23/2011	11:51:23 AM	H2 valve opened
8/23/2011	11:51:23 AM	Bubbler valve opened
8/23/2011	11:51:23 AM	Helium MFC set to  0.000000
8/23/2011	11:51:23 AM	H2 MFC set to  500.000000
8/23/2011	11:51:23 AM	BCl3 MFC set to  0.000000
8/23/2011	11:51:23 AM	PHl3 MFC set to  0.000000
8/23/2011	11:51:23 AM	SiCl4 MFC set to  0.000000
8/23/2011	11:51:23 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	11:51:23 AM	Tube furnace set to 750
8/23/2011	11:56:23 AM	H2 valve closed
8/23/2011	11:56:23 AM	BCl3 valve closed
8/23/2011	11:56:23 AM	PH3 valve closed
8/23/2011	11:56:23 AM	SiCl4 pre valve closed
8/23/2011	11:56:23 AM	SiCl4 post valve closed
8/23/2011	11:56:23 AM	Main Vac valve closed
8/23/2011	11:56:23 AM	Bypass valve closed
8/23/2011	11:56:23 AM	Helium valve opened
8/23/2011	11:56:23 AM	Bubbler valve opened
8/23/2011	11:56:23 AM	Helium MFC set to  500.000000
8/23/2011	11:56:23 AM	H2 MFC set to  0.000000
8/23/2011	11:56:23 AM	BCl3 MFC set to  0.000000
8/23/2011	11:56:23 AM	PHl3 MFC set to  0.000000
8/23/2011	11:56:23 AM	SiCl4 MFC set to  0.000000
8/23/2011	11:56:23 AM	Bypass solenoid MFC set to  0.000000
8/23/2011	11:56:23 AM	Tube furnace set to 0
8/23/2011	12:29:43 PM	Helium valve closed
8/23/2011	12:29:43 PM	H2 valve closed
8/23/2011	12:29:43 PM	BCl3 valve closed
8/23/2011	12:29:43 PM	PH3 valve closed
8/23/2011	12:29:43 PM	SiCl4 pre valve closed
8/23/2011	12:29:43 PM	SiCl4 post valve closed
8/23/2011	12:29:43 PM	Main Vac valve closed
8/23/2011	12:29:43 PM	Bypass valve closed
8/23/2011	12:29:43 PM	Bubbler valve closed
8/23/2011	12:29:43 PM	Helium MFC set to  0.000000
8/23/2011	12:29:43 PM	H2 MFC set to  0.000000
8/23/2011	12:29:43 PM	BCl3 MFC set to  0.000000
8/23/2011	12:29:43 PM	PHl3 MFC set to  0.000000
8/23/2011	12:29:43 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:29:43 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:29:43 PM	Tube furnace set to 0
8/23/2011	12:29:44 PM	Run finished at 12:29 PM
8/23/2011	12:37:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/23/2011	12:37:02 PM	Recipe started at 12:37 PM
8/23/2011	12:37:02 PM	Helium valve closed
8/23/2011	12:37:02 PM	H2 valve closed
8/23/2011	12:37:02 PM	BCl3 valve closed
8/23/2011	12:37:02 PM	PH3 valve closed
8/23/2011	12:37:02 PM	SiCl4 pre valve closed
8/23/2011	12:37:02 PM	SiCl4 post valve closed
8/23/2011	12:37:02 PM	Main Vac valve closed
8/23/2011	12:37:02 PM	Bubbler valve closed
8/23/2011	12:37:02 PM	Bypass valve opened
8/23/2011	12:37:02 PM	Helium MFC set to  0.000000
8/23/2011	12:37:02 PM	H2 MFC set to  0.000000
8/23/2011	12:37:02 PM	BCl3 MFC set to  0.000000
8/23/2011	12:37:02 PM	PHl3 MFC set to  0.000000
8/23/2011	12:37:02 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:37:02 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:37:02 PM	Tube furnace set to 0
8/23/2011	12:38:12 PM	Helium valve closed
8/23/2011	12:38:12 PM	H2 valve closed
8/23/2011	12:38:12 PM	BCl3 valve closed
8/23/2011	12:38:12 PM	PH3 valve closed
8/23/2011	12:38:12 PM	SiCl4 pre valve closed
8/23/2011	12:38:12 PM	SiCl4 post valve closed
8/23/2011	12:38:12 PM	Main Vac valve closed
8/23/2011	12:38:12 PM	Bubbler valve closed
8/23/2011	12:38:12 PM	Bypass valve opened
8/23/2011	12:38:12 PM	Helium MFC set to  0.000000
8/23/2011	12:38:12 PM	H2 MFC set to  0.000000
8/23/2011	12:38:12 PM	BCl3 MFC set to  0.000000
8/23/2011	12:38:12 PM	PHl3 MFC set to  0.000000
8/23/2011	12:38:12 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:38:12 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:38:12 PM	Tube furnace set to 0
8/23/2011	12:39:12 PM	Helium valve closed
8/23/2011	12:39:12 PM	H2 valve closed
8/23/2011	12:39:12 PM	BCl3 valve closed
8/23/2011	12:39:12 PM	PH3 valve closed
8/23/2011	12:39:12 PM	SiCl4 pre valve closed
8/23/2011	12:39:12 PM	SiCl4 post valve closed
8/23/2011	12:39:12 PM	Bypass valve closed
8/23/2011	12:39:12 PM	Bubbler valve closed
8/23/2011	12:39:12 PM	Main Vac valve opened
8/23/2011	12:39:12 PM	Helium MFC set to  0.000000
8/23/2011	12:39:12 PM	H2 MFC set to  0.000000
8/23/2011	12:39:12 PM	BCl3 MFC set to  0.000000
8/23/2011	12:39:12 PM	PHl3 MFC set to  0.000000
8/23/2011	12:39:12 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:39:12 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:39:12 PM	Tube furnace set to 0
8/23/2011	12:39:13 PM	Run finished at 12:39 PM
8/23/2011	12:39:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/23/2011	12:43:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/23/2011	12:43:54 PM	Recipe started at 12:43 PM
8/23/2011	12:43:54 PM	Helium valve closed
8/23/2011	12:43:54 PM	H2 valve closed
8/23/2011	12:43:54 PM	BCl3 valve closed
8/23/2011	12:43:54 PM	PH3 valve closed
8/23/2011	12:43:54 PM	SiCl4 pre valve closed
8/23/2011	12:43:54 PM	SiCl4 post valve closed
8/23/2011	12:43:54 PM	Main Vac valve closed
8/23/2011	12:43:54 PM	Bubbler valve closed
8/23/2011	12:43:54 PM	Bypass valve opened
8/23/2011	12:43:54 PM	Helium MFC set to  0.000000
8/23/2011	12:43:54 PM	H2 MFC set to  0.000000
8/23/2011	12:43:54 PM	BCl3 MFC set to  0.000000
8/23/2011	12:43:54 PM	PHl3 MFC set to  0.000000
8/23/2011	12:43:54 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:43:54 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:43:54 PM	Tube furnace set to 0
8/23/2011	12:43:54 PM	Helium valve closed
8/23/2011	12:43:54 PM	H2 valve closed
8/23/2011	12:43:54 PM	BCl3 valve closed
8/23/2011	12:43:54 PM	PH3 valve closed
8/23/2011	12:43:54 PM	SiCl4 pre valve closed
8/23/2011	12:43:54 PM	SiCl4 post valve closed
8/23/2011	12:43:54 PM	Main Vac valve closed
8/23/2011	12:43:54 PM	Bubbler valve closed
8/23/2011	12:43:54 PM	Bypass valve opened
8/23/2011	12:43:54 PM	Helium MFC set to  0.000000
8/23/2011	12:43:54 PM	H2 MFC set to  0.000000
8/23/2011	12:43:54 PM	BCl3 MFC set to  0.000000
8/23/2011	12:43:54 PM	PHl3 MFC set to  0.000000
8/23/2011	12:43:54 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:43:54 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:43:54 PM	Tube furnace set to 0
8/23/2011	12:44:24 PM	Helium valve closed
8/23/2011	12:44:24 PM	H2 valve closed
8/23/2011	12:44:24 PM	BCl3 valve closed
8/23/2011	12:44:24 PM	PH3 valve closed
8/23/2011	12:44:24 PM	SiCl4 pre valve closed
8/23/2011	12:44:24 PM	SiCl4 post valve closed
8/23/2011	12:44:24 PM	Bypass valve closed
8/23/2011	12:44:24 PM	Bubbler valve closed
8/23/2011	12:44:24 PM	Main Vac valve opened
8/23/2011	12:44:24 PM	Helium MFC set to  0.000000
8/23/2011	12:44:24 PM	H2 MFC set to  0.000000
8/23/2011	12:44:24 PM	BCl3 MFC set to  0.000000
8/23/2011	12:44:24 PM	PHl3 MFC set to  0.000000
8/23/2011	12:44:24 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:44:24 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:44:25 PM	Tube furnace set to 0
8/23/2011	12:44:55 PM	H2 valve closed
8/23/2011	12:44:55 PM	BCl3 valve closed
8/23/2011	12:44:55 PM	PH3 valve closed
8/23/2011	12:44:55 PM	SiCl4 pre valve closed
8/23/2011	12:44:55 PM	SiCl4 post valve closed
8/23/2011	12:44:55 PM	Bypass valve closed
8/23/2011	12:44:55 PM	Bubbler valve closed
8/23/2011	12:44:55 PM	Helium valve opened
8/23/2011	12:44:55 PM	Main Vac valve opened
8/23/2011	12:44:55 PM	Helium MFC set to  20.000000
8/23/2011	12:44:55 PM	H2 MFC set to  0.000000
8/23/2011	12:44:55 PM	BCl3 MFC set to  0.000000
8/23/2011	12:44:55 PM	PHl3 MFC set to  0.000000
8/23/2011	12:44:55 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:44:55 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:44:55 PM	Tube furnace set to 0
8/23/2011	12:45:25 PM	Helium valve closed
8/23/2011	12:45:25 PM	H2 valve closed
8/23/2011	12:45:25 PM	BCl3 valve closed
8/23/2011	12:45:25 PM	PH3 valve closed
8/23/2011	12:45:25 PM	SiCl4 pre valve closed
8/23/2011	12:45:25 PM	SiCl4 post valve closed
8/23/2011	12:45:25 PM	Bypass valve closed
8/23/2011	12:45:25 PM	Bubbler valve closed
8/23/2011	12:45:25 PM	Main Vac valve opened
8/23/2011	12:45:25 PM	Helium MFC set to  0.000000
8/23/2011	12:45:25 PM	H2 MFC set to  0.000000
8/23/2011	12:45:25 PM	BCl3 MFC set to  0.000000
8/23/2011	12:45:25 PM	PHl3 MFC set to  0.000000
8/23/2011	12:45:25 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:45:25 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:45:25 PM	Tube furnace set to 0
8/23/2011	12:45:55 PM	H2 valve closed
8/23/2011	12:45:55 PM	BCl3 valve closed
8/23/2011	12:45:55 PM	PH3 valve closed
8/23/2011	12:45:55 PM	SiCl4 pre valve closed
8/23/2011	12:45:55 PM	SiCl4 post valve closed
8/23/2011	12:45:55 PM	Bypass valve closed
8/23/2011	12:45:55 PM	Bubbler valve closed
8/23/2011	12:45:55 PM	Helium valve opened
8/23/2011	12:45:55 PM	Main Vac valve opened
8/23/2011	12:45:55 PM	Helium MFC set to  20.000000
8/23/2011	12:45:55 PM	H2 MFC set to  0.000000
8/23/2011	12:45:55 PM	BCl3 MFC set to  0.000000
8/23/2011	12:45:55 PM	PHl3 MFC set to  0.000000
8/23/2011	12:45:55 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:45:55 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:45:55 PM	Tube furnace set to 0
8/23/2011	12:46:25 PM	Helium valve closed
8/23/2011	12:46:25 PM	H2 valve closed
8/23/2011	12:46:25 PM	BCl3 valve closed
8/23/2011	12:46:25 PM	PH3 valve closed
8/23/2011	12:46:25 PM	SiCl4 pre valve closed
8/23/2011	12:46:25 PM	SiCl4 post valve closed
8/23/2011	12:46:25 PM	Bypass valve closed
8/23/2011	12:46:25 PM	Bubbler valve closed
8/23/2011	12:46:25 PM	Main Vac valve opened
8/23/2011	12:46:25 PM	Helium MFC set to  0.000000
8/23/2011	12:46:25 PM	H2 MFC set to  0.000000
8/23/2011	12:46:25 PM	BCl3 MFC set to  0.000000
8/23/2011	12:46:25 PM	PHl3 MFC set to  0.000000
8/23/2011	12:46:25 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:46:25 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:46:25 PM	Tube furnace set to 0
8/23/2011	12:46:55 PM	H2 valve closed
8/23/2011	12:46:55 PM	BCl3 valve closed
8/23/2011	12:46:55 PM	PH3 valve closed
8/23/2011	12:46:55 PM	SiCl4 pre valve closed
8/23/2011	12:46:55 PM	SiCl4 post valve closed
8/23/2011	12:46:55 PM	Bypass valve closed
8/23/2011	12:46:55 PM	Bubbler valve closed
8/23/2011	12:46:55 PM	Helium valve opened
8/23/2011	12:46:55 PM	Main Vac valve opened
8/23/2011	12:46:55 PM	Helium MFC set to  20.000000
8/23/2011	12:46:55 PM	H2 MFC set to  0.000000
8/23/2011	12:46:55 PM	BCl3 MFC set to  0.000000
8/23/2011	12:46:55 PM	PHl3 MFC set to  0.000000
8/23/2011	12:46:55 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:46:55 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:46:56 PM	Tube furnace set to 0
8/23/2011	12:47:26 PM	Helium valve closed
8/23/2011	12:47:26 PM	H2 valve closed
8/23/2011	12:47:26 PM	BCl3 valve closed
8/23/2011	12:47:26 PM	PH3 valve closed
8/23/2011	12:47:26 PM	SiCl4 pre valve closed
8/23/2011	12:47:26 PM	SiCl4 post valve closed
8/23/2011	12:47:26 PM	Bypass valve closed
8/23/2011	12:47:26 PM	Bubbler valve closed
8/23/2011	12:47:26 PM	Main Vac valve opened
8/23/2011	12:47:26 PM	Helium MFC set to  0.000000
8/23/2011	12:47:26 PM	H2 MFC set to  0.000000
8/23/2011	12:47:26 PM	BCl3 MFC set to  0.000000
8/23/2011	12:47:26 PM	PHl3 MFC set to  0.000000
8/23/2011	12:47:26 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:47:26 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:47:26 PM	Tube furnace set to 0
8/23/2011	12:47:56 PM	H2 valve closed
8/23/2011	12:47:56 PM	BCl3 valve closed
8/23/2011	12:47:56 PM	PH3 valve closed
8/23/2011	12:47:56 PM	SiCl4 pre valve closed
8/23/2011	12:47:56 PM	SiCl4 post valve closed
8/23/2011	12:47:56 PM	Bypass valve closed
8/23/2011	12:47:56 PM	Bubbler valve closed
8/23/2011	12:47:56 PM	Helium valve opened
8/23/2011	12:47:56 PM	Main Vac valve opened
8/23/2011	12:47:56 PM	Helium MFC set to  20.000000
8/23/2011	12:47:56 PM	H2 MFC set to  0.000000
8/23/2011	12:47:56 PM	BCl3 MFC set to  0.000000
8/23/2011	12:47:56 PM	PHl3 MFC set to  0.000000
8/23/2011	12:47:56 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:47:56 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:47:56 PM	Tube furnace set to 0
8/23/2011	12:48:26 PM	Helium valve closed
8/23/2011	12:48:26 PM	H2 valve closed
8/23/2011	12:48:26 PM	BCl3 valve closed
8/23/2011	12:48:26 PM	PH3 valve closed
8/23/2011	12:48:26 PM	SiCl4 pre valve closed
8/23/2011	12:48:26 PM	SiCl4 post valve closed
8/23/2011	12:48:26 PM	Bypass valve closed
8/23/2011	12:48:26 PM	Bubbler valve closed
8/23/2011	12:48:26 PM	Main Vac valve opened
8/23/2011	12:48:26 PM	Helium MFC set to  0.000000
8/23/2011	12:48:26 PM	H2 MFC set to  0.000000
8/23/2011	12:48:26 PM	BCl3 MFC set to  0.000000
8/23/2011	12:48:26 PM	PHl3 MFC set to  0.000000
8/23/2011	12:48:26 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:48:26 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:48:26 PM	Tube furnace set to 0
8/23/2011	12:48:56 PM	H2 valve closed
8/23/2011	12:48:56 PM	BCl3 valve closed
8/23/2011	12:48:56 PM	PH3 valve closed
8/23/2011	12:48:56 PM	SiCl4 pre valve closed
8/23/2011	12:48:56 PM	SiCl4 post valve closed
8/23/2011	12:48:56 PM	Bypass valve closed
8/23/2011	12:48:56 PM	Bubbler valve closed
8/23/2011	12:48:56 PM	Helium valve opened
8/23/2011	12:48:56 PM	Main Vac valve opened
8/23/2011	12:48:56 PM	Helium MFC set to  20.000000
8/23/2011	12:48:56 PM	H2 MFC set to  0.000000
8/23/2011	12:48:56 PM	BCl3 MFC set to  0.000000
8/23/2011	12:48:56 PM	PHl3 MFC set to  0.000000
8/23/2011	12:48:56 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:48:56 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:48:56 PM	Tube furnace set to 0
8/23/2011	12:49:26 PM	Helium valve closed
8/23/2011	12:49:26 PM	H2 valve closed
8/23/2011	12:49:26 PM	BCl3 valve closed
8/23/2011	12:49:26 PM	PH3 valve closed
8/23/2011	12:49:26 PM	SiCl4 pre valve closed
8/23/2011	12:49:26 PM	SiCl4 post valve closed
8/23/2011	12:49:26 PM	Bypass valve closed
8/23/2011	12:49:26 PM	Bubbler valve closed
8/23/2011	12:49:26 PM	Main Vac valve opened
8/23/2011	12:49:26 PM	Helium MFC set to  0.000000
8/23/2011	12:49:26 PM	H2 MFC set to  0.000000
8/23/2011	12:49:26 PM	BCl3 MFC set to  0.000000
8/23/2011	12:49:26 PM	PHl3 MFC set to  0.000000
8/23/2011	12:49:26 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:49:26 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:49:27 PM	Tube furnace set to 0
8/23/2011	12:49:57 PM	H2 valve closed
8/23/2011	12:49:57 PM	BCl3 valve closed
8/23/2011	12:49:57 PM	PH3 valve closed
8/23/2011	12:49:57 PM	SiCl4 pre valve closed
8/23/2011	12:49:57 PM	SiCl4 post valve closed
8/23/2011	12:49:57 PM	Bypass valve closed
8/23/2011	12:49:57 PM	Bubbler valve closed
8/23/2011	12:49:57 PM	Helium valve opened
8/23/2011	12:49:57 PM	Main Vac valve opened
8/23/2011	12:49:57 PM	Helium MFC set to  20.000000
8/23/2011	12:49:57 PM	H2 MFC set to  0.000000
8/23/2011	12:49:57 PM	BCl3 MFC set to  0.000000
8/23/2011	12:49:57 PM	PHl3 MFC set to  0.000000
8/23/2011	12:49:57 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:49:57 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:49:57 PM	Tube furnace set to 0
8/23/2011	12:50:27 PM	Helium valve closed
8/23/2011	12:50:27 PM	H2 valve closed
8/23/2011	12:50:27 PM	BCl3 valve closed
8/23/2011	12:50:27 PM	PH3 valve closed
8/23/2011	12:50:27 PM	SiCl4 pre valve closed
8/23/2011	12:50:27 PM	SiCl4 post valve closed
8/23/2011	12:50:27 PM	Bypass valve closed
8/23/2011	12:50:27 PM	Bubbler valve closed
8/23/2011	12:50:27 PM	Main Vac valve opened
8/23/2011	12:50:27 PM	Helium MFC set to  0.000000
8/23/2011	12:50:27 PM	H2 MFC set to  0.000000
8/23/2011	12:50:27 PM	BCl3 MFC set to  0.000000
8/23/2011	12:50:27 PM	PHl3 MFC set to  0.000000
8/23/2011	12:50:27 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:50:27 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:50:27 PM	Tube furnace set to 0
8/23/2011	12:50:57 PM	H2 valve closed
8/23/2011	12:50:57 PM	BCl3 valve closed
8/23/2011	12:50:57 PM	PH3 valve closed
8/23/2011	12:50:57 PM	SiCl4 pre valve closed
8/23/2011	12:50:57 PM	SiCl4 post valve closed
8/23/2011	12:50:57 PM	Bypass valve closed
8/23/2011	12:50:57 PM	Bubbler valve closed
8/23/2011	12:50:57 PM	Helium valve opened
8/23/2011	12:50:57 PM	Main Vac valve opened
8/23/2011	12:50:57 PM	Helium MFC set to  20.000000
8/23/2011	12:50:57 PM	H2 MFC set to  0.000000
8/23/2011	12:50:57 PM	BCl3 MFC set to  0.000000
8/23/2011	12:50:57 PM	PHl3 MFC set to  0.000000
8/23/2011	12:50:57 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:50:57 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:50:57 PM	Tube furnace set to 0
8/23/2011	12:51:27 PM	Helium valve closed
8/23/2011	12:51:27 PM	H2 valve closed
8/23/2011	12:51:27 PM	BCl3 valve closed
8/23/2011	12:51:27 PM	PH3 valve closed
8/23/2011	12:51:27 PM	SiCl4 pre valve closed
8/23/2011	12:51:27 PM	SiCl4 post valve closed
8/23/2011	12:51:27 PM	Bypass valve closed
8/23/2011	12:51:27 PM	Bubbler valve closed
8/23/2011	12:51:27 PM	Main Vac valve opened
8/23/2011	12:51:27 PM	Helium MFC set to  0.000000
8/23/2011	12:51:27 PM	H2 MFC set to  0.000000
8/23/2011	12:51:27 PM	BCl3 MFC set to  0.000000
8/23/2011	12:51:27 PM	PHl3 MFC set to  0.000000
8/23/2011	12:51:27 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:51:27 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:51:28 PM	Tube furnace set to 0
8/23/2011	12:51:58 PM	H2 valve closed
8/23/2011	12:51:58 PM	BCl3 valve closed
8/23/2011	12:51:58 PM	PH3 valve closed
8/23/2011	12:51:58 PM	SiCl4 pre valve closed
8/23/2011	12:51:58 PM	SiCl4 post valve closed
8/23/2011	12:51:58 PM	Bypass valve closed
8/23/2011	12:51:58 PM	Bubbler valve closed
8/23/2011	12:51:58 PM	Helium valve opened
8/23/2011	12:51:58 PM	Main Vac valve opened
8/23/2011	12:51:58 PM	Helium MFC set to  20.000000
8/23/2011	12:51:58 PM	H2 MFC set to  0.000000
8/23/2011	12:51:58 PM	BCl3 MFC set to  0.000000
8/23/2011	12:51:58 PM	PHl3 MFC set to  0.000000
8/23/2011	12:51:58 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:51:58 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:51:58 PM	Tube furnace set to 0
8/23/2011	12:52:28 PM	Helium valve closed
8/23/2011	12:52:28 PM	H2 valve closed
8/23/2011	12:52:28 PM	BCl3 valve closed
8/23/2011	12:52:28 PM	PH3 valve closed
8/23/2011	12:52:28 PM	SiCl4 pre valve closed
8/23/2011	12:52:28 PM	SiCl4 post valve closed
8/23/2011	12:52:28 PM	Bypass valve closed
8/23/2011	12:52:28 PM	Bubbler valve closed
8/23/2011	12:52:28 PM	Main Vac valve opened
8/23/2011	12:52:28 PM	Helium MFC set to  0.000000
8/23/2011	12:52:28 PM	H2 MFC set to  0.000000
8/23/2011	12:52:28 PM	BCl3 MFC set to  0.000000
8/23/2011	12:52:28 PM	PHl3 MFC set to  0.000000
8/23/2011	12:52:28 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:52:28 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:52:28 PM	Tube furnace set to 0
8/23/2011	12:52:58 PM	H2 valve closed
8/23/2011	12:52:58 PM	BCl3 valve closed
8/23/2011	12:52:58 PM	PH3 valve closed
8/23/2011	12:52:58 PM	SiCl4 pre valve closed
8/23/2011	12:52:58 PM	SiCl4 post valve closed
8/23/2011	12:52:58 PM	Bypass valve closed
8/23/2011	12:52:58 PM	Bubbler valve closed
8/23/2011	12:52:58 PM	Helium valve opened
8/23/2011	12:52:58 PM	Main Vac valve opened
8/23/2011	12:52:58 PM	Helium MFC set to  20.000000
8/23/2011	12:52:58 PM	H2 MFC set to  0.000000
8/23/2011	12:52:58 PM	BCl3 MFC set to  0.000000
8/23/2011	12:52:58 PM	PHl3 MFC set to  0.000000
8/23/2011	12:52:58 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:52:58 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:52:58 PM	Tube furnace set to 0
8/23/2011	12:53:28 PM	Helium valve closed
8/23/2011	12:53:28 PM	H2 valve closed
8/23/2011	12:53:28 PM	BCl3 valve closed
8/23/2011	12:53:28 PM	PH3 valve closed
8/23/2011	12:53:28 PM	SiCl4 pre valve closed
8/23/2011	12:53:28 PM	SiCl4 post valve closed
8/23/2011	12:53:28 PM	Bypass valve closed
8/23/2011	12:53:28 PM	Bubbler valve closed
8/23/2011	12:53:28 PM	Main Vac valve opened
8/23/2011	12:53:28 PM	Helium MFC set to  0.000000
8/23/2011	12:53:28 PM	H2 MFC set to  0.000000
8/23/2011	12:53:28 PM	BCl3 MFC set to  0.000000
8/23/2011	12:53:28 PM	PHl3 MFC set to  0.000000
8/23/2011	12:53:28 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:53:28 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:53:28 PM	Tube furnace set to 0
8/23/2011	12:53:58 PM	H2 valve closed
8/23/2011	12:53:58 PM	BCl3 valve closed
8/23/2011	12:53:58 PM	PH3 valve closed
8/23/2011	12:53:58 PM	SiCl4 pre valve closed
8/23/2011	12:53:58 PM	SiCl4 post valve closed
8/23/2011	12:53:58 PM	Bypass valve closed
8/23/2011	12:53:58 PM	Bubbler valve closed
8/23/2011	12:53:58 PM	Helium valve opened
8/23/2011	12:53:58 PM	Main Vac valve opened
8/23/2011	12:53:58 PM	Helium MFC set to  20.000000
8/23/2011	12:53:58 PM	H2 MFC set to  0.000000
8/23/2011	12:53:58 PM	BCl3 MFC set to  0.000000
8/23/2011	12:53:58 PM	PHl3 MFC set to  0.000000
8/23/2011	12:53:58 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:53:58 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:53:59 PM	Tube furnace set to 0
8/23/2011	12:54:29 PM	Helium valve closed
8/23/2011	12:54:29 PM	H2 valve closed
8/23/2011	12:54:29 PM	BCl3 valve closed
8/23/2011	12:54:29 PM	PH3 valve closed
8/23/2011	12:54:29 PM	SiCl4 pre valve closed
8/23/2011	12:54:29 PM	SiCl4 post valve closed
8/23/2011	12:54:29 PM	Bypass valve closed
8/23/2011	12:54:29 PM	Bubbler valve closed
8/23/2011	12:54:29 PM	Main Vac valve opened
8/23/2011	12:54:29 PM	Helium MFC set to  0.000000
8/23/2011	12:54:29 PM	H2 MFC set to  0.000000
8/23/2011	12:54:29 PM	BCl3 MFC set to  0.000000
8/23/2011	12:54:29 PM	PHl3 MFC set to  0.000000
8/23/2011	12:54:29 PM	SiCl4 MFC set to  0.000000
8/23/2011	12:54:29 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	12:54:29 PM	Tube furnace set to 0
8/23/2011	12:54:30 PM	Run finished at 12:54 PM
8/23/2011	12:54:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/23/2011	1:47:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/23/2011	1:47:11 PM	Recipe started at 1:47 PM
8/23/2011	1:47:11 PM	Helium valve closed
8/23/2011	1:47:11 PM	H2 valve closed
8/23/2011	1:47:11 PM	BCl3 valve closed
8/23/2011	1:47:11 PM	PH3 valve closed
8/23/2011	1:47:11 PM	SiCl4 pre valve closed
8/23/2011	1:47:11 PM	SiCl4 post valve closed
8/23/2011	1:47:11 PM	Main Vac valve closed
8/23/2011	1:47:11 PM	Bypass valve closed
8/23/2011	1:47:11 PM	Bubbler valve closed
8/23/2011	1:47:11 PM	Helium MFC set to  0.000000
8/23/2011	1:47:11 PM	H2 MFC set to  0.000000
8/23/2011	1:47:11 PM	BCl3 MFC set to  0.000000
8/23/2011	1:47:11 PM	PHl3 MFC set to  0.000000
8/23/2011	1:47:11 PM	SiCl4 MFC set to  0.000000
8/23/2011	1:47:11 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	1:47:11 PM	Tube furnace set to 0
8/23/2011	1:47:11 PM	Run finished at 1:47 PM
8/23/2011	1:47:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/23/2011	1:47:38 PM	Main Vac valve opened
8/23/2011	1:48:28 PM	Recipe started at 1:48 PM
8/23/2011	1:48:28 PM	Helium valve closed
8/23/2011	1:48:28 PM	H2 valve closed
8/23/2011	1:48:28 PM	BCl3 valve closed
8/23/2011	1:48:28 PM	PH3 valve closed
8/23/2011	1:48:28 PM	SiCl4 pre valve closed
8/23/2011	1:48:28 PM	SiCl4 post valve closed
8/23/2011	1:48:28 PM	Main Vac valve closed
8/23/2011	1:48:28 PM	Bypass valve closed
8/23/2011	1:48:28 PM	Bubbler valve closed
8/23/2011	1:48:28 PM	Helium MFC set to  0.000000
8/23/2011	1:48:28 PM	H2 MFC set to  0.000000
8/23/2011	1:48:28 PM	BCl3 MFC set to  0.000000
8/23/2011	1:48:28 PM	PHl3 MFC set to  0.000000
8/23/2011	1:48:28 PM	SiCl4 MFC set to  0.000000
8/23/2011	1:48:28 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	1:48:29 PM	Tube furnace set to 0
8/23/2011	1:48:32 PM	Helium valve closed
8/23/2011	1:48:32 PM	BCl3 valve closed
8/23/2011	1:48:32 PM	PH3 valve closed
8/23/2011	1:48:32 PM	SiCl4 pre valve closed
8/23/2011	1:48:32 PM	SiCl4 post valve closed
8/23/2011	1:48:32 PM	Main Vac valve closed
8/23/2011	1:48:32 PM	Bypass valve closed
8/23/2011	1:48:32 PM	Bubbler valve closed
8/23/2011	1:48:32 PM	H2 valve opened
8/23/2011	1:48:32 PM	Helium MFC set to  0.000000
8/23/2011	1:48:32 PM	H2 MFC set to  500.000000
8/23/2011	1:48:32 PM	BCl3 MFC set to  0.000000
8/23/2011	1:48:32 PM	PHl3 MFC set to  0.000000
8/23/2011	1:48:32 PM	SiCl4 MFC set to  0.000000
8/23/2011	1:48:32 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	1:48:32 PM	Tube furnace set to 0
8/23/2011	1:49:37 PM	Helium valve closed
8/23/2011	1:49:37 PM	BCl3 valve closed
8/23/2011	1:49:37 PM	PH3 valve closed
8/23/2011	1:49:37 PM	SiCl4 pre valve closed
8/23/2011	1:49:37 PM	SiCl4 post valve closed
8/23/2011	1:49:37 PM	Main Vac valve closed
8/23/2011	1:49:37 PM	Bypass valve closed
8/23/2011	1:49:37 PM	H2 valve opened
8/23/2011	1:49:37 PM	Bubbler valve opened
8/23/2011	1:49:37 PM	Helium MFC set to  0.000000
8/23/2011	1:49:37 PM	H2 MFC set to  500.000000
8/23/2011	1:49:37 PM	BCl3 MFC set to  0.000000
8/23/2011	1:49:37 PM	PHl3 MFC set to  0.000000
8/23/2011	1:49:37 PM	SiCl4 MFC set to  0.000000
8/23/2011	1:49:37 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	1:49:37 PM	Tube furnace set to 0
8/23/2011	1:49:39 PM	Helium valve closed
8/23/2011	1:49:39 PM	BCl3 valve closed
8/23/2011	1:49:39 PM	PH3 valve closed
8/23/2011	1:49:39 PM	SiCl4 pre valve closed
8/23/2011	1:49:39 PM	SiCl4 post valve closed
8/23/2011	1:49:39 PM	Main Vac valve closed
8/23/2011	1:49:39 PM	Bypass valve closed
8/23/2011	1:49:39 PM	H2 valve opened
8/23/2011	1:49:39 PM	Bubbler valve opened
8/23/2011	1:49:39 PM	Helium MFC set to  0.000000
8/23/2011	1:49:39 PM	H2 MFC set to  500.000000
8/23/2011	1:49:39 PM	BCl3 MFC set to  0.000000
8/23/2011	1:49:39 PM	PHl3 MFC set to  0.000000
8/23/2011	1:49:39 PM	SiCl4 MFC set to  0.000000
8/23/2011	1:49:39 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	1:49:39 PM	Tube furnace set to 1000
8/23/2011	2:09:39 PM	Helium valve closed
8/23/2011	2:09:39 PM	PH3 valve closed
8/23/2011	2:09:39 PM	Main Vac valve closed
8/23/2011	2:09:39 PM	Bypass valve closed
8/23/2011	2:09:39 PM	H2 valve opened
8/23/2011	2:09:39 PM	BCl3 valve opened
8/23/2011	2:09:39 PM	SiCl4 pre valve opened
8/23/2011	2:09:39 PM	SiCl4 post valve opened
8/23/2011	2:09:39 PM	Bubbler valve opened
8/23/2011	2:09:39 PM	Helium MFC set to  0.000000
8/23/2011	2:09:39 PM	H2 MFC set to  500.000000
8/23/2011	2:09:39 PM	BCl3 MFC set to  2.500000
8/23/2011	2:09:39 PM	PHl3 MFC set to  0.000000
8/23/2011	2:09:39 PM	SiCl4 MFC set to  50.000000
8/23/2011	2:09:39 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	2:09:39 PM	Tube furnace set to 1000
8/23/2011	2:14:39 PM	Helium valve closed
8/23/2011	2:14:39 PM	BCl3 valve closed
8/23/2011	2:14:39 PM	PH3 valve closed
8/23/2011	2:14:39 PM	SiCl4 pre valve closed
8/23/2011	2:14:39 PM	SiCl4 post valve closed
8/23/2011	2:14:39 PM	Main Vac valve closed
8/23/2011	2:14:39 PM	Bypass valve closed
8/23/2011	2:14:39 PM	H2 valve opened
8/23/2011	2:14:39 PM	Bubbler valve opened
8/23/2011	2:14:39 PM	Helium MFC set to  0.000000
8/23/2011	2:14:39 PM	H2 MFC set to  500.000000
8/23/2011	2:14:39 PM	BCl3 MFC set to  0.000000
8/23/2011	2:14:39 PM	PHl3 MFC set to  0.000000
8/23/2011	2:14:39 PM	SiCl4 MFC set to  0.000000
8/23/2011	2:14:39 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	2:14:39 PM	Tube furnace set to 750
8/23/2011	2:19:39 PM	H2 valve closed
8/23/2011	2:19:39 PM	BCl3 valve closed
8/23/2011	2:19:39 PM	PH3 valve closed
8/23/2011	2:19:39 PM	SiCl4 pre valve closed
8/23/2011	2:19:39 PM	SiCl4 post valve closed
8/23/2011	2:19:39 PM	Main Vac valve closed
8/23/2011	2:19:39 PM	Bypass valve closed
8/23/2011	2:19:39 PM	Helium valve opened
8/23/2011	2:19:39 PM	Bubbler valve opened
8/23/2011	2:19:39 PM	Helium MFC set to  500.000000
8/23/2011	2:19:39 PM	H2 MFC set to  0.000000
8/23/2011	2:19:39 PM	BCl3 MFC set to  0.000000
8/23/2011	2:19:39 PM	PHl3 MFC set to  0.000000
8/23/2011	2:19:39 PM	SiCl4 MFC set to  0.000000
8/23/2011	2:19:39 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	2:19:39 PM	Tube furnace set to 0
8/23/2011	2:52:59 PM	Helium valve closed
8/23/2011	2:52:59 PM	H2 valve closed
8/23/2011	2:52:59 PM	BCl3 valve closed
8/23/2011	2:52:59 PM	PH3 valve closed
8/23/2011	2:52:59 PM	SiCl4 pre valve closed
8/23/2011	2:52:59 PM	SiCl4 post valve closed
8/23/2011	2:52:59 PM	Main Vac valve closed
8/23/2011	2:52:59 PM	Bypass valve closed
8/23/2011	2:52:59 PM	Bubbler valve closed
8/23/2011	2:52:59 PM	Helium MFC set to  0.000000
8/23/2011	2:52:59 PM	H2 MFC set to  0.000000
8/23/2011	2:52:59 PM	BCl3 MFC set to  0.000000
8/23/2011	2:52:59 PM	PHl3 MFC set to  0.000000
8/23/2011	2:52:59 PM	SiCl4 MFC set to  0.000000
8/23/2011	2:52:59 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	2:52:59 PM	Tube furnace set to 0
8/23/2011	2:53:00 PM	Run finished at 2:53 PM
8/23/2011	2:59:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/23/2011	2:59:28 PM	Recipe started at 2:59 PM
8/23/2011	2:59:28 PM	Helium valve closed
8/23/2011	2:59:28 PM	H2 valve closed
8/23/2011	2:59:28 PM	BCl3 valve closed
8/23/2011	2:59:28 PM	PH3 valve closed
8/23/2011	2:59:28 PM	SiCl4 pre valve closed
8/23/2011	2:59:28 PM	SiCl4 post valve closed
8/23/2011	2:59:28 PM	Main Vac valve closed
8/23/2011	2:59:28 PM	Bubbler valve closed
8/23/2011	2:59:28 PM	Bypass valve opened
8/23/2011	2:59:28 PM	Helium MFC set to  0.000000
8/23/2011	2:59:28 PM	H2 MFC set to  0.000000
8/23/2011	2:59:28 PM	BCl3 MFC set to  0.000000
8/23/2011	2:59:28 PM	PHl3 MFC set to  0.000000
8/23/2011	2:59:28 PM	SiCl4 MFC set to  0.000000
8/23/2011	2:59:28 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	2:59:28 PM	Tube furnace set to 0
8/23/2011	3:00:31 PM	Helium valve closed
8/23/2011	3:00:31 PM	H2 valve closed
8/23/2011	3:00:31 PM	BCl3 valve closed
8/23/2011	3:00:31 PM	PH3 valve closed
8/23/2011	3:00:31 PM	SiCl4 pre valve closed
8/23/2011	3:00:31 PM	SiCl4 post valve closed
8/23/2011	3:00:31 PM	Main Vac valve closed
8/23/2011	3:00:31 PM	Bubbler valve closed
8/23/2011	3:00:32 PM	Bypass valve opened
8/23/2011	3:00:32 PM	Helium MFC set to  0.000000
8/23/2011	3:00:32 PM	H2 MFC set to  0.000000
8/23/2011	3:00:32 PM	BCl3 MFC set to  0.000000
8/23/2011	3:00:32 PM	PHl3 MFC set to  0.000000
8/23/2011	3:00:32 PM	SiCl4 MFC set to  0.000000
8/23/2011	3:00:32 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	3:00:32 PM	Tube furnace set to 0
8/23/2011	3:01:32 PM	Helium valve closed
8/23/2011	3:01:32 PM	H2 valve closed
8/23/2011	3:01:32 PM	BCl3 valve closed
8/23/2011	3:01:32 PM	PH3 valve closed
8/23/2011	3:01:32 PM	SiCl4 pre valve closed
8/23/2011	3:01:32 PM	SiCl4 post valve closed
8/23/2011	3:01:32 PM	Bypass valve closed
8/23/2011	3:01:32 PM	Bubbler valve closed
8/23/2011	3:01:32 PM	Main Vac valve opened
8/23/2011	3:01:32 PM	Helium MFC set to  0.000000
8/23/2011	3:01:32 PM	H2 MFC set to  0.000000
8/23/2011	3:01:32 PM	BCl3 MFC set to  0.000000
8/23/2011	3:01:32 PM	PHl3 MFC set to  0.000000
8/23/2011	3:01:32 PM	SiCl4 MFC set to  0.000000
8/23/2011	3:01:32 PM	Bypass solenoid MFC set to  0.000000
8/23/2011	3:01:32 PM	Tube furnace set to 0
8/23/2011	3:01:33 PM	Run finished at 3:01 PM
8/23/2011	3:01:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
